XD laser interferometer realizes efficient detection of high-end precision automation equipment

With the rise or advancement of high-end manufacturing industries such as LCD panel, solar photovoltaic, lithium new energy, laser, mounting, semiconductor, medical manufacturing, precision inkjet, precision detection, dispensing and so on, it has brought huge demand for precision automation equipment; In order to meet the corresponding technical requirements of high-end manufacturing industry, the manufacturing and calibration technical standards of automation equipment are also improving; Among them, measurement and detection in the production and manufacturing process and calibration during equipment service are the most important links, providing the most solid guarantee for the stable operation of automation equipment.

Characteristics and testing requirements of high-end automation equipment

For high-end precision automation equipment, generally, there are many forms of linear motor drive combination using marble platform frame (as shown in Figure 1). This kind of platform usually has two X axes and two Y axes, and there are many data requiring attention in terms of accuracy.

In addition to strictly controlling straightness, verticality and parallelism during installation, after installation, The linear error (positioning accuracy, repeatability), small angle (yaw angle, pitch angle, rolling angle) and other data of linear motor motion also need to be paid full attention. However, using traditional detection methods to detect these error parameters is often time-consuming and labor-consuming, and it is difficult to obtain the best guarantee for accuracy and objectivity.
API solutions

Based on the high-quality inspection standards and the inspection requirements for the above parameters, XD Laser Interferometer is used, One installation can simultaneously detect: linear positioning error (positioning accuracy, repeated positioning accuracy, reverse clearance), straightness error (XX direction and YY direction), perpendicularity error, and angle error (pitch angle, yaw angle, rolling angle) (as shown in Figure 2). The measurement efficiency is more than five times higher than that of traditional Laser Interferometer!

Characteristics of XD laser interferometer

1.Realize linear positioning error measurement: including positioning accuracy, repeated positioning accuracy and reverse clearance;

2.Realize straightness measurement: including straightness in two directions (vertical and horizontal) perpendicular to the direction of the motion axis;

3.Angle measurement: pitch angle, yaw angle and rolling angle in motion;

4.The above parameters can be measured at the same time without replacing the optical components, and the efficiency is more than five times higher than that of the traditional interferometer;

5.There is no fear of light interruption in straightness and angle measurement, which can be used instead of collimator to guide and adjust the installation;

6.The installation is flexible and convenient, and a variety of installation methods can be selected, which can be used conveniently even in the most harsh crowded environment;

7.Precision type is optional, which can fully meet the needs of factories and laboratories.

Overall machine tool error detection & compensation solution

In addition to XD laser interferometer, API has also developed machine tool error detection and compensation equipment and technologies based on independent scientific research, such as swivelcheck angular pendulum tester, Ballbar Club tester, spindlecheck Spindle Analyzer, VEC large machine tool spatial error compensation technology, etc., to provide you with a comprehensive solution for machine tool error detection and calibration. Please contact API local offices for details.